上海偉務(wù)低溫真空設(shè)備有限公司
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86-021-58951587
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上海偉務(wù)低溫真空設(shè)備有限公司
免企業(yè)未認(rèn)證證營業(yè)執(zhí)照未上傳
經(jīng)營模式：工廠
主營產(chǎn)品：CTI低溫泵,GP真空計(jì),干泵,油泵,真空元件,Ulvac低溫泵
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MICROPIRANI™ / PIEZO LOADLOCK TRANSDUCER
Sensor Type 1 MicroPirani™ (MEMS Thermal Conductivity)
Sensor Type 2 Piezo differential (MEMS diaphragm)
MicroPirani Accuracy(1)
5 X 10-4 to 1 X 10-3 Torr ±10% of reading
1 X 10-3 to 100 Torr ±5% of reading
100 Torr to Atm ±25% of reading
Repeatability(1)
1 X 10-3 to 100 Torr ±2% of reading
Transducer Model：901P Loadlock
Flange：KF25
Interface：RS232 / Analog
